全自動FOUP洗浄システム UPC-12500 − SORA
19,963 views • Sep 30, 2011
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UPC-12500 FULL AUTOMATIC FOUP CLEANING SYSTEM
UPC-12500 FULL AUTOMATIC FOUP CLEANING SYSTEM
0:05
LOAD PORT RF-TAG・パーコード読み取りのいずれにも対応可能
LOAD PORT RF-TAG・パーコード読み取りのいずれにも対応可能
0:09
TRANSFER ROBOT HUGLE特別仕様の6曲多関節クリーンロボット採用
TRANSFER ROBOT HUGLE特別仕様の6曲多関節クリーンロボット採用
0:17
Instrument Panel オンライン通信にて各種用力情報をSVDにて送信可能
Instrument Panel オンライン通信にて各種用力情報をSVDにて送信可能
0:34
UPC-12500 is a fully automated cleaning system that washes and dries one FOUP in its chamber.
UPC-12500 is a fully automated cleaning system that washes and dries one FOUP in its chamber.
0:51
Super high purity is achieved by DIW Jet Wash and through various innovative technology
Super high purity is achieved by DIW Jet Wash and through various innovative technology
0:55
such as high speed FOUP door spinning for quick dry. in addition to high velocity heated CDA
such as high speed FOUP door spinning for quick dry. in addition to high velocity heated CDA
0:59
The robot automatically separates FOUP Shell from FOUP Door.
The robot automatically separates FOUP Shell from FOUP Door.
1:19
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Hugle Electronics
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